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Overview 概述
Many technologies have been used to construct accelerometers. The most common include Piezoelectric (PE), Integral Electronics Piezoelectric (IEPE), Piezoresitive (PR) and Variable Capacitance (VC). Each technology offers numerous benefits and is used in different applications.
工程振動(dòng)量值的物理參數(shù)常用位移、速度和加速度來表示。由于在通常的頻率范圍內(nèi)振動(dòng)位移幅值量很小，且位移、速度和加速度之間都可互相轉(zhuǎn)換，所以在實(shí)際使用中振動(dòng)量的大小一般用加速度的值來度量。常用單位為：米/秒2 (m/s2)，或重力加速度(g)。
描述振動(dòng)信號的另一重要參數(shù)是信號的頻率。絕大多數(shù)的工程振動(dòng)信號均可分解成一系列特定頻率和幅值的正弦信號，因此，對某一振動(dòng)信號的測量，實(shí)際上是對組成該振動(dòng)信號的正弦頻率分量的測量。對傳感器主要性能指標(biāo)的考核也是根據(jù)傳感器在其規(guī)定的頻率范圍內(nèi)測量幅值精度的高低來評定。
現(xiàn)有加速度計(jì)應(yīng)用多種技術(shù)原理。的振動(dòng)測量傳感器按各自的工作原理可分為壓電式、壓電放大式，壓阻式、電容式。每種技術(shù)都有相應(yīng)的優(yōu)點(diǎn)用于不同測量領(lǐng)域。
Piezoelectric accelerometers (PE)
PE accelerometers incorporate piezoelectric crystals such as quartz or tourmaline or more often with ferroelectric ceramic materials. These accelerometers are self-charging devices, meaning that they create an electric signal when a force is applied. No power supply is required however an external charge amplifier is required to convert the high impedance output to a usable low impedance voltage signal. Due to the high impedance output of PE accelerometers noise treated cables are required.
壓電式(PE)- 原理和特點(diǎn)
壓電式傳感器是利用彈簧質(zhì)量系統(tǒng)原理。敏感芯體質(zhì)量受振動(dòng)加速度作用后產(chǎn)生一個(gè)與加速度成正比的力，壓電材料受此力作用后沿其表面形成與這一力成正比的電荷信號。壓電式加速度傳感器具有動(dòng)態(tài)范圍大、頻率范圍寬、堅(jiān)固耐用、受外界干擾小以及壓電材料受力自產(chǎn)生電荷信號不需要任何外界電源等特點(diǎn)，是被廣泛使用的振動(dòng)測量傳感器。雖然壓電式加速度傳感器的結(jié)構(gòu)簡單，商業(yè)化使用歷史也很長，但因其性能指標(biāo)與材料特性、設(shè)計(jì)和加工工藝密切相關(guān)，因此在市場上銷售的同類傳感器性能的實(shí)際參數(shù)以及其穩(wěn)定性和一致性差別非常大。與壓阻和電容式相比，其的缺點(diǎn)是壓電式加速度傳感器不能測量零頻率的信號。壓電式加速度傳感器雖然能自己產(chǎn)生電荷信號，但其必需要一個(gè)外部的電荷放大器將信號放大成電壓信號方便低外阻的測量儀器采集。由于壓電加速計(jì)是高內(nèi)阻的，所以必須采用低噪聲電纜采集電荷信號（非常昂貴）。
Integral Electronics Piezoelectric (IEPE)
Piezoelectric accelerometers are often packaged with on-board integral electronics that provide an amplified voltage signal output. The use of an internal amplifier eliminates the need to use noise treated cables but does require an external constant current power supply to power the electronics.
壓電放大式(IEPE)（ICP輸出）
壓電傳感器經(jīng)常在傳感器內(nèi)部集成一個(gè)電荷放大器將電荷轉(zhuǎn)換成電壓輸出，這種設(shè)計(jì)可以避免使用低噪聲電纜，但需要用用外部的電流源驅(qū)動(dòng)電路。
Piezoresistive (PR)
Piezoresistive accelerometers incorporate an active Wheatstone bridge to generate an output signal when stressed. The Wheatstone bridge configuration is typically etched on a MEMS (Micro-Electro Mechanical Systems) sensing element. PR accelerometers require an external DC power supply and internal signal conditioning can be incorporated to provide an amplified output. They are ideal for both steady-state as well as dynamic measurements.
壓阻式
應(yīng)變壓阻式加速度傳感器的敏感芯體為半導(dǎo)體材料制成電阻測量電橋，其結(jié)構(gòu)動(dòng)態(tài)模型仍然是彈簧質(zhì)量系統(tǒng)。現(xiàn)代微加工制造技術(shù)MEMS (Micro-Electro Mechanical Systems)的發(fā)展使壓阻形式敏感芯體的設(shè)計(jì)具有很大的靈活性以適合各種不同的測量要求。在靈敏度和量程方面，從低靈敏度高量程的沖擊測量，到直流高靈敏度的低頻測量都有壓阻形式的加速度傳感器。同時(shí)壓阻式加速度傳感器測量頻率范圍也可從直流信號到具有剛度高，測量頻率范圍到幾十千赫茲的高頻測量。超小型化的設(shè)計(jì)也是壓阻式傳感器的一個(gè)亮點(diǎn)。需要指出的是盡管壓阻敏感芯體的設(shè)計(jì)和應(yīng)用具有很大靈活性，但對某個(gè)特定設(shè)計(jì)的壓阻式芯體而言其使用范圍一般要小于壓電型傳感器。壓阻式加速度傳感器的另一缺點(diǎn)是受溫度的影響較大，實(shí)用的傳感器一般都需要進(jìn)行溫度補(bǔ)償。在價(jià)格方面，大批量使用的壓阻式傳感器成本價(jià)具有很大的市場競爭力，但對特殊使用的敏感芯體制造成本將遠(yuǎn)高于壓電型加速度傳感器。壓阻加速計(jì)需要外部驅(qū)動(dòng)電壓，內(nèi)部可以合成信號放大器輸出放大信號。此類加速度計(jì)的同時(shí)適用于靜態(tài)和動(dòng)態(tài)測試測量。
Variable Capacitance (VC)
Variable capacitance accelerometers incorporate a seismic mass that moves between two parallel capacitor plates. The change in capacitance in directly proportional to the applied acceleration. VC accelerometers require an IC to be closely coupled to the sensing element in order to convert the very small capacitance changes into a voltage output. This conversion process often adds noise to the signal. VC accelerometers are ideal for both steady-state as well as dynamic measurements however the bandwidth is typically limited.
電容式
電容型加速度傳感器的結(jié)構(gòu)形式一般也采用彈簧質(zhì)量系統(tǒng)。當(dāng)質(zhì)量受加速度作用運(yùn)動(dòng)而改變質(zhì)量塊與固定電極之間的間隙進(jìn)而使電容值變化。電容式加速度計(jì)與其它類型的加速度傳感器相比具有靈敏度高、零頻響應(yīng)、環(huán)境適應(yīng)性好等特點(diǎn)，尤其是受溫度的影響比較小；但不足之處表現(xiàn)在信號的輸入與輸出為非線性，量程有限，頻響窄，受電纜的電容影響，以及電容傳感器本身是高阻抗信號源，因此電容傳感器的輸出信號往往需通過后繼電路（IC）給于改善。需要后續(xù)電路將微小的電容變化轉(zhuǎn)換成電壓信號，信號轉(zhuǎn)換過程容易引進(jìn)噪聲到信號里面啊。在實(shí)際應(yīng)用中電容式加速度傳感器較多地用于低頻測量，其通用性不如壓電式加速度傳感器，且成本也比壓電式加速度傳感器高得多。
Which Technology to Use?如何選擇傳感器？
No one technology can effectively meet the application requirements of all customers. Each technology has its own unique strengths and weaknesses. Below is a chart (Figure 1) that lists Key Measurement Criteria and accelerometer technologies. The black circle under each technology indicates a unique strength of that technology. For example, you will see that PE has a black circle beside High Temperature Capability and Broad Temperature Range.
沒有任何一種技術(shù)能滿足所有用戶要求，每種技術(shù)都尤其*優(yōu)點(diǎn)和缺點(diǎn)，下面是一個(gè)產(chǎn)品的性能優(yōu)缺對照表，打黑點(diǎn)意味著產(chǎn)品有此長處。
Figure 1: Strengths of Accelerometer Technologies
PE | IEPE | PR | VC | |
Key Measurement Criteria | Piezoelectric | Integrated Electronics Piezoelectric | Piezoresistive | Variable Capacitance |
Low Noise | = | = | ||
High Temperature Capability | = | |||
Low Temperature Capability | = | |||
No Power Required | = | |||
Signal Stability | = | = | = | |
Steady State Measurements | = | = | ||
Dynamic Measurements | = | = | = | = |
Miniaturization | = | = | ||
Reliability | = | = | = | |
Lower Cost | = | = | = | |
Wide g Range | = | |||
Wide Frequency Range | = | = | = | |
Broad Temperature Range | = | |||
Low Cable Noise | = | = | ||
Can Use Low Cost Cable | = | = | = | |
Can Use Long Cable Lengths | = | = | ||
Easy to Install | = | = | = | |
Withstａnd Radiation | = | |||
Stability over Temperature | = | = | ||
Stable ZMO over Time | = | = | ||
No Low Frequency Roll-Off | = | = |
PE vs IEPE Type Accelerometers重點(diǎn)分析壓電(PE)和壓電放大類(IEPE)傳感器優(yōu)缺點(diǎn)
The advantages and disadvantages of PE and IEPE type accelerometers are listed in the chart below (Figure 2). Some typical applications are also listed below the chart.
以下是兩種傳感器的優(yōu)缺比較。
Figure 2: Strengths of Accelerometer Technologies
Sensor Type | Advantages | Limitations |
PE | 1. Adjustable full scale output through range changes in charge amplifier 可以隨意調(diào)整點(diǎn)和放大器達(dá)到調(diào)整量程的目的 2. High temperature operation to 700oC available for special purpose devices 特殊情況下傳感器可以應(yīng)用到700 oC 3. Simpler design, fewer parts 設(shè)計(jì)簡單，零件少 4. Charge converter electronics is usually at ambient condition, away from test environment 電荷放大器在常溫下工作，可以遠(yuǎn)離傳感部位 | 1. High impedance circuitry must be kept clean and dry (sensor, low noise cable, charge converter amplifier) 高內(nèi)阻的電路必須保證干擾少和環(huán)境干燥 2. Special low noise cable required to minimize triboelectric noise (generated by cable motion) 必須特制電纜以減少電纜摩擦靜電 3. Capacitive loading from long cable run results in noise floor increase 長電纜會帶來電容效應(yīng)增加噪聲 4. External charge amplifier is usually not sealed against contaminants 外部電荷放大器很難做到良好密封 |
IEPE | 1. Less operator attention, training and installation expertise required 使用者不需要專業(yè)的提醒，培訓(xùn)和安裝經(jīng)驗(yàn) 2. High impedance circuitry sealed in sensor is more resistant to contaminants 放大電路密封在傳感器內(nèi)部能抵抗外面的臟污 3. Uses standard coaxial cable or ribbon wire 一般的同軸電纜和排線就可以使用 4. Drives long cables without noise increase or loss of resolution 長電纜的情況下不會增加噪聲和降低分辨率 5. Lower total system cost per channel 每通道的成本較低 | 1. Full scale output characteristics fixed within sensor-- lack of range adjustability 量程/滿量程輸出固定—量程靈活性不夠 2. Limited temperature range (oC for general purpose, oC for special purpose) 溫度限制，一般情況下oC，特殊情況下可以oC 3. Discharge time constant (affects low frequency response characteristics) is fixed within the sensor 放電時(shí)間常數(shù)固定（影響低頻響應(yīng)） 4. The built-in amplifier is always exposed to the same test environment as the sensor 內(nèi)部電荷放大電路和傳感器一起在測量部位 |
· Measurements in contaminated environments (high humidity, moisture, dirty/dusty, high electromagnetic interference) favor the use of low output impedance IEPE transducers.
· 在臟污環(huán)境下（高濕度，潮氣，灰塵，高電磁干擾）測量時(shí)，建議用地內(nèi)阻的IEPE加速度傳感器。
· Measurements in extreme thermal environments favor the selection of PE transducers. General purpose IEPE sensors are limited to a relatively limited operating range (-55oC to +125oC) compared to PE type sensors.
· 在環(huán)境溫度下測量，建議用PE加速度傳感器。
· Long cable runs favor the use of IEPE transducers due to noise floor and per-channel costs (PE required low noise cables and in-line remote charge converters increase costs).
· 遠(yuǎn)距離測量時(shí)使用IEPE加速度傳感器可以減少噪聲和電纜成本。
· Shock measurements where the likely measurement range is unknown favors the use of PE type sensors.
· 在測量沖擊（量程）大小不清楚的情況下，建議用PE型加速度傳感器。
· Measurements on small and lightweight structures favors the selection of low output impedance IEPE transducers which allow the use of very flexible ribbon wires as the output cable.
· 在輕小型機(jī)構(gòu)測量中，因?yàn)檫\(yùn)動(dòng)幅度較大，建議用IEPE加速度傳感器 ，電纜柔韌度好。
· If use of TEDS technology sensors is desired, use of IEPE transducers is required
· 如果有要求用TEDS身份識別技術(shù)，就必須要IEPE加速度傳感器了。
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